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Name: Profile and Roughness tester Model: MPR100 Num: Profile and Roughness tester
Features & Advantges:
1. Combined with Profile and Rougness detector in one machine
2. Digital Profile detector
3. Real-time Profile track display
4. Standard roughness detector without nosepiece
Technical data:
Model MPR100 Measuring range
X axis
100~220mm
Z axis
320~620mm
Z1 axis
C:0~±30mm/R:±420μm
Profile accuracy
Z1 linear
±(1.5+|0.2H|)μm
Arc
±(2+R/8)μm
Angle
±2′
Straightness
0.8μm/100mm
Roughness accuracy
Linear
±(7nm+3.5%)μm
Residual noise
≤0.025μm
Repeatability
1δ≤2nm
Cutoff wavelength
0.025、0.08、0.25、0.8、2.5、8mm
Evaluation length
λcX2、3、4、5、6、7
Driving speed
X axis: 0.1-10mm/s
Z axis: 0.5-10mm/s