MR100

 X axis

 100~220mm

Z axis

 320~620mm

 Z1 axis

 ±420μm/65536:1

 Roughness accuracy

Linear

 ±(7nm+3.5%)μm

Repeatability

 1δ≤2nm

Cutoff wavelength

0.025、0.08、0.25、0.8、2.5、8mm

Evaluation length

 λcX2、3、4、5、6、7

 Driving speed

 X axis: 0.1-10mm/s

 Z axis: 0.5-10mm/s

Roughness paramters

Ra、Rp、Rv、Rz、Rz（jis）、R3z、RzDIN、Rzj、Rmax、Rc、Rt、Rq、Rsk、Rku、Rsm、Rs、R△q、Rk、Rpk、Rvk、Mr1、Mr2、Rmr

Waviness paramter

Wa、Wt、Wp、Wv、Wz、Wq、Wsm、Wsk、Wku、Wmr

Profile paramter

Pa、Pt、Pp、Pv、Pz、Pq、Psm、Psk、Pku、Pmr