Usage£º
INSPECT series measuring metallurgical microscope are widely used in semiconductor packages, solder pads, loop height, FPD panels (LCM), wafer level CSPS and so on.
Features:
¡ö High-precision marble base, table and column to ensure high stability and rigidity
¡ö Marble table design, with precision V-shaped cross rail, ensure long-term use without deform, effectively guarantee high mechanical precision
¡ö High-quality optical system and high-resolution CCD ensure sharp image edges
¡ö Three-ring and eight-zone LED ring surface cold light source and contour light source, avoid the deformation of precision parts caused by the heat from light
¡ö Optional Nikon tilting trinocular tube + quintuple nosepiece
¡ö Independent research and development of image measuring software, powerful and easy to operate
Technical data£º
Model
|
INSPECT300
|
INSPECT400
|
INSPECT500
|
X¡¢Y axis travel£¨mm£©
|
300*200
|
400*300
|
500*400
|
Stage glass size(mm)
|
357*257
|
457*357
|
557*457
|
Z axis travel£¨mm£©
|
100
|
X¡¢Y¡¢Z axis resolution (μm)
|
1
|
Length unit
|
Linear scale
|
Measuring accuracy (μm)
|
2.5+L/150 L=measuring length (mm)
|
Operation mode(X, Y)
|
Manual
|
Operation mode(Z)
|
CNC
|
Camera
|
High resolution CCD camera
|
Quintuple nosepiece
|
5X
|
10X
|
20X
|
50X
|
Eyepiece
|
WF10X
|
Measuring software
|
2D measuring software
|
Illumination
|
Transmitted
|
Epi-illumination system
|
Contour
|
LED parallel contour light
|
Power supply
|
AC100~240V 50/60Hz
|
|